Fundamentals of Chemical Vapor Deposition: Chemistry for CVD

The Basics: Atoms, Molecules, and Bonds

• Introduction to Chemistry
• Atoms and Bonds
• Diatomic Molecules
• Hybrid Orbitals

Thermodynamics and CVD

• Volatility
• Equilibrium

Kinetics in the Gas and at the Surface

• Kinetics
• Surface Chemistry
• Examples of Real Precursors

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Book version of the CVD Tutorial