Ideal Gases
As a beginning it is helpful to recall some aspects of dealing with gases and vapors.
Most Gases and vapors in CVD are for practical purposes "ideal":
PV = NRT
P = pressure (Pascal)
V = volume (m3)
N = number of (gram)moles
R = universal gas constant, 8.3 Joules/mole K
T = absolute temperature (K)
Gas flows are usually measured and reported as:
standard liters per minute (SLPM) or
standard cubic centimeters per minute (sccm).
Both measure gas volume at 0 C, 1 atmosphere: these are measures of MOLAR flow
Pressure is often also reported in other units, most frequently Torr (which are millimeters of mercury), and standard atmospheres.
USEFUL CONVERSIONS:
1 atm = 760 Torr = 101,000 Pa
1 Pa = 7.6 milliT = 7.6 mT
1 cubic meter = 1000 liters = 106 cm3
K = C + 273
1 mole = 22.4 liters at "STP" (0 C, 1 atmosphere)
1 liter = 0.045 moles at STP
1 cm3 = 4.5x10-5 moles @ STP
1 cm3 = 6.4x10-8 moles @ 1 Torr, 23 C
1 A/minute = 1.6E-10*(molar density)
moles/(cm2 second)
1 SLPM = 7.4x10-4 moles/second
1 sccm = 7.4x10-7 moles/second
k = 1.38E-23 J/°C
R = N(Avogadro)*k
= 8.3 J/ mole °C
= 8,300 J/kg-mole °C
= 8.2x10-2 liter atm/mole °C
= 62 torr liter/ mole °C
An important consequence of the ideal gas law for practical CVD reactors:
In most CVD applications absolute temperature varies modestly (factors of 2 to 3) whereas pressure varies tremendously (factors of 1000)=> large volume expansions occur! A few cubic centimeters of input gas at atmospheric pressure can become liters of gas at chamber operating pressure.
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